한국전기화학회

Vol.8, No.1, February 2005

A Study On the Electrical Characteristic of WO3 and NiO-WO3 Thin Films Prepared by Thermal EvaporationThermal Evaporation법에 의해 제조된 WO3 박막과 NiO-WO3박막의 전기적 특성에 관한 연구: JKES Vol.8, No.1, pp.32~31, February 2005; DOI : 10.5229/JKES.2005.8.1.032

Eun-young Na, Dong-myong Na, and Jin-seong Park나은영, 나동명, 박진성

Research Institute of Energy Resources Technology, Chosun University, Gwangju 501-759, Korea Department of Advanced Materials Engineering, Chosun University, Gwangju 501-759, Korea조선대학교 에너지자원신기술연구소, 조선대학교 신소재공학과

WO3 and NiO-WO3 thin films were deposited on a Si (100) substrate by using high vacuum thermal evaporation. The effects of various film thicknesses on the surface morphology WO3 and NiO-WO3 thin films were investigated. X-ray diffraction (XRD), Scanning e

Keyword : NiO-WO3 thin film, Thermal evaporation, WO3 thin film, Surface morphology, XPS.

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JKES

Vol.8, No.1, February 2005