한국전기화학회

Vol.8, No.1, February 2005

Electrode Properties of Thin Film Battery with LiCoO2 Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial PressuresR.F. 마그네트론 스퍼터링을 이용한 LiCoO2 양극활물질의 Ar 증착분압에 따른 박막전지 전극 특성: JKES Vol.8, No.1, pp.37~36, February 2005; DOI : 10.5229/JKES.2005.8.1.037

H. Y. Park, Y. C. Lim, K. G. Choi, K. C. Lee, G. B. Park, M. Y. Kwon, S. B. Cho, and S. C. Nam박호영, 임영창, 최규길, 이기창, 박기백, 권미연, 조성백, 남상철

Microcell Center, Nuricell Inc., #503, Sinnaetechnotown 485 Sangbong dong, Jungrang-gu, Seoul 131-863, Korea Advanced Technology Research Center, Agency for Defense Development, Yuseong P.O. Box 35, Daejon 305-600, Korea㈜누리셀 마이크로셀 센터 국방과학연구소 기술연구본부

We investigated the electrochemical properties and microstructure on the various argon deposition pressure (PAr) and the low annealing temperature (400oC) of LiCoO2 cathodes, which deposited by R.F. magnetron sputtering. The microstructure and composition

Keyword : LiCoO2, Thin film, Microbattery, Sputtering, Cathode.

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JKES

Vol.8, No.1, February 2005