한국전기화학회

Vol.9, No.2, May 2006

Local Anodization on Si surface Using Scanning Probe Microscope; Effects of Tip Voltage, Deflection Setpoint, and Tip Velocity on Line Height주사탐침현미경을 이용한 Si 표면 국부 산화피막 형성시 선 높이에 대한 탐침 전위, 편향 셋포인트, 탐침 속도의 영향: JKES Vol.9, No.2, pp.84~88, May 2006; DOI : 10.5229/JKES.2006.9.2.084

Chang-Hwan Kim, Jeong-Woo Choi, Woon-Sup Shin김창환, 최정우, 신운섭

Department of Chemistry and Interdisciplinary Program of Integrated Biotechnology, Sogang University Department of Chemical & Biomolecular Engineering and Interdisciplinary Program of Integrated Biotechnology, Sogang University서강대학교 화학과, 바이오융합기술 협동과정 서강대학교 화공생명공학과, 바이오융합기술 협동과정

The effects of tip voltage, deflection setpoint, and tip velocity on height of SiO2 line drawn by local anodization on Si wafer using scanning probe microscope were investigated. No local anodization was detected at smaller than -3 V of tip voltage. The l

Keyword : Scanning probe microscope, Lithography, Local anodization, Nanofabrication.

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JKES

Vol.9, No.2, May 2006