한국전기화학회

Vol.8, No.4, November 2005

0.6 mAh All-Solid-State Thin Fim Battery Fabricated on Alumina Substrate알루미나 기판상에 구현된 0.6mAh급 전고상 박막전지: JKES Vol.8, No.4, pp.181~185, November 2005; DOI : 10.5229/JKES.2005.8.4.181

H.Y. Park, S.C. Nam, Y.C. Lim, K.G. Choi, K.C. Lee, G.B. Park, S.B. Cho박호영, 남상철, 임영창, 최규길, 이기창, 박기백, 조성백

Microcell Center, Nuricell Inc., #503, Sinnae Technotown 485 Sangbong-dong, Jungrang-gu, Seoul 131-863, Korea Advanced Technology Research Center, Agency for Defense Development, Yuseong P.O.Box 35, Daejeon, Korea(주) 누리셀마이크로셀센터 국방과학연구소기술연구본부

Lithium cobalt oxide thin film cathode, having thickness of 2.9 μm with area of 4 cm2, was deposited on platinum patterned alumina substrate by radio frequency magnetron sputtering. Li/Co molar ratio, which is an important factor for battery performance,

Keyword : Lithium cobalt oxide, Thin film battery, All-solid-state, Sputtering.

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JKES

Vol.8, No.4, November 2005