한국전기화학회

Vol.8, No.3, August 2005

Reaction Gas Composition Dependence on the Properties of SnO2 Films on PET Substrate by ECR-MOCVD반응가스조성이 PET기판위에 ECR 화학증착법에 의해 제조된 SnO2 박막특성에 미치는 영향: JKES Vol.8, No.3, pp.139~145, August 2005; DOI : 10.5229/JKES.2005.8.3.139

Yun Seok Kim, Joong Kee Lee김연석, 이중기

Eco-Nano Technology Research Center, Korea Institute of Science and Technology, P.O.Box 131, Cheongryang, Seoul 130-650, Korea한국과학기술연구원나노환경연구센터

SnOX films on the flexible substrate of PET film were prepared at ambient temperature under a (CH3)4Sn(TMT: tetra-methyl tin)-H2-O2 atmosphere in order to obtain transparent conductive polymer by using ECRMOCVD( Electro Cyclotron Resonance Metal Organic C

Keyword : SnOX, PET, ECR-MOCVD, Composition ratio, Transmittance, Resistivity.

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JKES

Vol.8, No.3, August 2005