Heung-Taek Shim, Bup-Ju Jeon, Dongjin Byun, Joong Kee Lee심흥택, 전법주, 변동진, 이중기
Eco Nano Research center, Korea Institute of Science Technology, P.O. BOX 131, Cheongryang, Seoul, 130-650, Korea
Dept. of Materials Science Engineering, Korea University, Seoul, 136-701, Korea
Silicon thin film were synthesized from silane and argon gas mixture directly on copper foil by rf PECVD
and then lithium ion batteries were prepared from them employed as the negative electrodes without any further
treatment. In the present study, two di
Keyword : PECVD, Silicon thin film, Copper silicide, Anode, Li ion battery